Substrate temperature monitoring

ABSTRACT

Embodiments disclosed herein generally relate to a substrate temperature monitoring system in a substrate support assembly. In one embodiment, the substrate support assembly includes a support plate and a substrate temperature monitoring system. The support plate has a top surface configured to support a substrate. The substrate temperature monitoring system is disposed in the substrate support plate. The substrate temperature monitoring system is configured to measure a temperature of the substrate from a bottom surface of the substrate. The substrate temperature monitoring system includes a window, a body, and a temperature sensor. The window is integrally formed in a top surface of the support plate. The body is embedded in the support plate, through the bottom surface. The body defines an interior passage. The temperature sensor is disposed in the interior passage beneath the window. The temperature sensor is configured to measure the temperature of the substrate.

BACKGROUND

Field

Embodiments described herein generally relate to a substrate temperaturemonitoring system.

Description of the Related Art

Flat panel displays (FPD) are commonly used for active matrix displayssuch as computer and television monitors, personal digital assistants(PDAs), and cell phones, as well as solar cells and the like. Plasmaenhanced chemical vapor deposition (PECVD) may be employed in flat paneldisplay fabrication to deposit thin film on a substrate. PECVD isgenerally accomplished by executing a precursor gas into a plasma withina vacuum process chamber and depositing a film on a substrate from theexcited precursor gas.

During deposition, the plasma within the vacuum processing chamber heatsthe substrate and the substrate support assembly. The plasma may causethe temperature of the substrate support assembly to have a temporaltemperature increase or spike (e.g., about 30-50° C. increase, or20%-30% temperature increase from 150° C.). Such a large temperatureincrease of the substrate support assembly undesirably causes processvariation.

Thus, there is a need for an improved substrate temperature monitoringsystem for a substrate support assembly.

SUMMARY

Embodiments disclosed herein generally relate to a substrate temperaturemonitoring system in a substrate support assembly. In one embodiment thesubstrate support assembly is disclosed herein. The substrate supportassembly includes a support plate and a substrate temperature monitoringsystem. The support plate has a top surface configured to support asubstrate. The substrate temperature monitoring system is disposed inthe substrate support plate. The substrate temperature monitoring systemis configured to measure a temperature of the substrate from a bottomsurface of the substrate. The substrate temperature monitoring systemincludes a window, a body, and a temperature sensor. The window isintegrally formed in a top surface of the support plate. The body isembedded in the support plate, through the bottom surface. The bodydefines an interior passage. The temperature sensor is disposed in theinterior passage beneath the window. The temperature sensor isconfigured to measure the temperature of the substrate.

In another embodiment, a substrate support assembly is disclosed herein.The substrate support assembly includes a support plate and a substratetemperature monitoring system. The support plate has a top surfaceconfigured to support a substrate. The substrate temperature monitoringsystem is disposed in the support plate. The substrate temperaturemonitoring system is configured to measure a temperature of thesubstrate from a bottom surface of the substrate. The substratetemperature monitoring system includes a body, an aperture nut, a lens,an optical fiber tube, and a controller. The body defines an innercavity. The aperture nut is disposed in the body. The lens is disposedin the body and supported by the aperture nut. The optical fiber tube isdisposed in the inner cavity, spaced apart from the lens. The opticalfiber tube is configured to receive an infra-red ray from the bottom ofthe substrate through the lens. The controller is in communication withthe optical fiber tube. The controller is configured to determine thetemperature of the substrate based on the received infra-red rays.

In another embodiment, a processing chamber is disclosed herein. Theprocessing chamber includes a chamber body and a substrate supportassembly. The chamber body includes a top wall, a sidewall, and a bottomwall defining a processing region in the chamber body. The substratesupport assembly is disposed in the processing region. The substratesupport assembly includes a support plate and a substrate temperaturemonitoring system. The support plate has a top surface configured tosupport a substrate. The substrate temperature monitoring system isdisposed in the support plate and is configured to measure a temperatureof the substrate from a bottom surface of the substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

So that the manner in which the above recited features of the presentdisclosure can be understood in detail, a more particular description ofthe disclosure, briefly summarized above, may be had by reference toembodiments, some of which are illustrated in the appended drawings. Itis to be noted, however, that the appended drawings illustrate onlytypical embodiments of this disclosure and are therefore not to beconsidered limiting of its scope, for the disclosure may admit to otherequally effective embodiments.

FIG. 1 illustrates a cross-sectional view of a processing chamber havinga substrate support assembly disposed therein, according to oneembodiment.

FIG. 2 illustrates a cross sectional view of the support plate of FIG.1, revealing a substrate temperature monitoring system, according to oneembodiment.

FIG. 3A illustrates a cross sectional view of the support plate of FIG.1, revealing a substrate temperature monitoring system, according toanother embodiment.

FIG. 3B illustrates a ray trace diagram 350 of the substrate temperaturemonitoring system, according to one embodiment.

FIGS. 4A-4B illustrate a substrate temperature monitoring system in theform of a lift pin, according to one embodiment

For clarity, identical reference numerals have been used, whereapplicable, to designate identical elements that are common betweenfigures. Additionally, elements of one embodiment may be advantageouslyadapted for utilization in other embodiments described herein.

DETAILED DESCRIPTION

FIG. 1 illustrates a cross-sectional view of a processing chamber 100having a substrate support assembly 118 that includes at least onetemperature monitoring system, according to one embodiment. Theprocessing chamber 100 may include a chamber body 102 having sidewalls104, and a bottom 106 that define a processing volume 110. Theprocessing volume 110 is accessed through an opening 109 formed throughthe sidewalls 104.

A showerhead 108 is disposed in the processing volume 110. Theshowerhead 108 may be coupled to a backing plate 112. For example, theshowerhead 108 may be coupled to the backing plate 112 by a suspension114 at the end of the backing plate 112. One or more coupling supports116 may be used to couple the showerhead 108 to the backing plate 112 toaid in preventing sag.

The substrate support assembly 118 is also disposed in the processingvolume 110. The substrate support assembly 118 includes a support plate120 and a stem 122 coupled to the support plate 120. The support plate120 is configured to support a substrate 101 during processing. Thesupport plate 120 includes temperature control elements 124. Thetemperature control elements 124 are configured to maintain thesubstrate support assembly 118 at a desired temperature. The temperaturecontrol elements 124 run up through the stem 122 and extend below andacross the entire upper surface of the support plate 120.

As noted above, the substrate support assembly 118 may include one ormore substrate temperature monitoring systems 200, 300, and 400 disposedtherein. The substrate temperature monitoring systems 200, 300, and 400are configured to measure a temperature of the substrate 101 duringprocessing. The substrate temperature monitoring systems 200-400 may becoupled to a proportional-integral-derivative (PID) controller 190. ThePID controller 190 configured to continually read the temperature of thesubstrate and adjust the amount of cooling fluid supplied to thetemperature control elements 124. The substrate temperature monitoringsystems 200-400 are discussed in more detail below, in conjunction withFIGS. 2-4B.

A lift system 126 may be coupled to the stem 122 to raise and lower thesupport plate 120. Lift pins 128 are moveably disposed through thesupport plate 120 to space the substrate 101 from the support plate 120to facilitate robotic transfer of the substrate 101. The substratesupport assembly 118 may also include RF return straps 130 to provide anRF return path at an end of the substrate support assembly 118.

A gas source 132 may be coupled to the backing plate 112 to provideprocessing gas through a gas outlet 134 in the backing plate 112. Theprocessing gas flows from the gas outlet 134 through gas passages 136 inthe showerhead 108. A vacuum pump 111 may be coupled to the chamber 100to control the pressure within the processing volume 110. An RF powersource 138 may be coupled to the backing plate 112 and/or to theshowerhead 108 to provide RF power to the showerhead 108. The RF powercreates an electric field between the showerhead 108 and the substratesupport assembly 118 so that a plasma may be generated from the gasesbetween the showerhead 108 and the substrate support assembly 118.

A remote plasma source 140, such as an inductively coupled remote plasmasource, may also be coupled between the gas source 132 and the backingplate 112. Between processing substrates, a cleaning gas may be providedto the remote plasma source 140 so that a remote plasma is generated andprovided into the processing volume 110 to clean chamber components. Thecleaning gas may be further excited while in the processing volume 110by power applied to the showerhead 108 from the RF power source 138.Suitable cleaning gases include but are not limited to NF₃, F₂, and SF₆.

FIG. 2 illustrates a cross sectional view taken of the support plate 120through section line B-B depicted in FIG. 1, revealing the substratetemperature monitoring system 200, according to one embodiment. Thesubstrate temperature monitoring system 200 includes a body 202 havingan interior passage 212 and a window 204. The body 202 is embedded inthe support plate 120 through a bottom surface 192 of the support plate120. In the embodiment shown in FIG. 2, the body 202 is a hex-headedplug that is screwed into the support plate 120. One or more seals 210may be positioned between the support plate 120 and the body 202 to sealthe body 202 to the support plate 120.

The window 204 may be positioned below or flush with the top surface 194of the support plate 120. The flush/recessed window 204 allows thesubstrate 101 to lay flat on the support plate 120. The window 204 maybe formed from a transparent material. For example, the window 204 maybe formed from sapphire, yttrium, or other suitable material.

The substrate temperature monitoring system 200 further includes atemperature sensor 206 and fiber tube 208. The temperature sensor 206and fiber tube 208 are disposed in the interior passage 212 of the body202. The temperature sensor 206 is disposed beneath the window 204, suchthat the temperature sensor 206 may measure a temperature of thesubstrate 101 during processing. The fiber tube 208 couples thetemperature sensor 206 to the PID controller 190. The plurality of seals210 may also be positioned between the fiber tube 208 and the body 202.

FIG. 3A is a cross-sectional view of the support plate 120, revealing asubstrate temperature monitoring system 300, according to oneembodiment. The substrate temperature monitoring system 300 includes abody 302 defining an interior passage 304, a lens 306, an aperture nut308, and an optical fiber tube 310. The body 302 is disposed in thesupport plate 120, beneath a tapped hole 312 formed in the support plate120. The aperture nut 308 is disposed in the body 302. The aperture nut308 is configured to hold the lens 306 in place. The aperture nut 308includes a conical aperture 309 that is aligned with the lens 306. Theoptical fiber tube 310 is disposed in the interior passage 304, beneaththe lens 306. For example, the optical fiber tube 310 is screwed intothe body 302 using an SMA 905 connection on the optical fiber tube 310.The fiber tube 310 is configured to receive a focused IR beam comingfrom the bottom of the substrate 101 through the lens 306. The fibertube 310 is coupled to PID controller 190 that determines a temperatureof the substrate 101 based on the received IR rays emitted from thebottom of the substrate 101.

In one embodiment, the lens 306 is a plano-convex lens, which focusesthe IR rays emitting from the substrate 101 back to the fiber tube 310.The fiber tube 310 has an acceptance cone angle (or numerical aperture)requirement. For example, a 1000 μm fiber has an output divergence halfangle of about 30 mRad, which corresponds to a half cone angle of 1.7degrees, or full cone angle of 3.4 degrees. If the rays entering thefiber tube 310 from the substrate underfill or overfill the fiber tube310, the transmission through the fiber tube 310 suffers, and thus, thedetector will read a misrepresentation of the temperature (i.e., lowsignal to noise ratio). The lens 306 enhances IR transmission by makingsure that the IR rays entering the fiber tube 310 are within theacceptance cone of the fiber tube 310. Additionally, the tapped hole 312formed in the support plate 120 has a conical shaped end 314. Theconical shaped end 314 is configured to prevent IR beam clipping comingfrom the substrate. If the hole 312 was purely vertical, the light beamcoming from the substrate 101 would be clipped, and hence, result inloss of signal.

The lens 306 may be formed from a transparent material. For example, inone embodiment, the lens 306 may be formed from MgF₂ (magnesiumfluoride), CaF₂ (calcium fluoride), BaF₂ (barium fluoride), or Yr₂O₃(crystalline yttria). The material of the lens 306 provides a sufficientchemical robustness to guard against the harsh cleaning agents used in aCVD process (e.g., an NF₃ cleaning agent, which is highly corrosive).Directly exposing the fiber tube 310 to NF₃ will gradually cause thefiber tube 310 to be etched away, thus reducing the effectiveness ofsignal transmission over time. The material of the lens 306 alsoexhibits enhanced transmission properties in the wavelength of interest(i.e., 5-15 μm). Thus, the lens 306 has superior performance compared toconventional lenses fabricated from an amorphous material transmittinginfrared radiation (AMTIR). AMTIR is less chemically stable (i.e., willbe etched by NF₃ over a period of time) and also has less overalltransmission (about 70%) as opposed to the materials from which the lens306 is fabricated, which has about 93% transmission in the samewavelength range.

The aperture in the aperture nut 308 is configured to reduce thenumerical aperture of the incoming rays and maintain the numericalaperture of image side rays within the acceptance code of the fiber.0-rings 316 are positioned beneath the lens 306, which are configured toseal and, hence, prevent the fiber tube 310 from being attacked by NF₃cleaning agent. The aperture nut 308 is also configured to provide thecompressive force to squeeze the o-rings 316 into their grooves.

The aperture nut 308 is formed from a low-emissivity, polished material.The low emissivity material enhances the substrate temperaturemonitoring system 300 because when the support plate 120 becomes hotduring the process, the body 302 and the aperture nut 308 will alsobecome hot. Hot objects tend to emit IR radiation at certaintemperatures. These IR rays would be collected by the optical fiber tube310, resulting in false temperature readings. Thus, the low emissivitymaterial ensures that the aperture nut 308 will not radiate a lot ofheat.

FIG. 3B illustrates an optical ray trace 350 of the substratetemperature monitoring system 300 in FIG. 3A. Point A illustrates thelocation of the object, which is a bottom surface of the substrate 101.Point B illustrates the location of the aperture in the aperture nut308, which is used to limit the numerical aperture of the object, andthus the numerical aperture of the image. Point C illustrates thelocation of the lens 306. Point D illustrates the location of the image.The optical fiber tube 310 is positioned at point D. The numericalaperture of the beam emerging from the lens 306 should match thenumerical aperture of the optical fiber tube 310. Point E illustratesthe location of the optical fiber tube 310, adjacent to point D. Point Fillustrates the location of a focal point of the lens 306 on the objectside. Point G illustrates the location of a focal point of the lens 306on the image side. Points H and J illustrate the principal planes of thelens 306. The aperture at point B is placed between the object sidefocal point at point F and the first principal plane at point H. Bydoing so, the aperture will form a virtual image behind the lens 306,thus enhancing the temperature readings.

FIGS. 4A and 4B illustrate a substrate temperature monitoring system 400in the form of lift pin 128, according to one embodiment. FIG. 4Aillustrates a cross-sectional view of the lift pin 128. The lift pin 128includes a body 402 having an interior passage 404. The body 402 mayinclude a rounded top surface 406 for contacting the substrate when inuse.

The lift pin 128 further includes a temperature sensor 408, a fiber tube410, and a cap 412. The temperature sensor 408 may be disposed in theinterior passage 404 of the body 402. The cap 412 may be integrallyformed with the top surface 406. The cap 412 is positioned about thetemperature sensor 408, such that the cap 412 protects the temperaturesensor 408 from contacting the substrate 101 or body 402. In oneembodiment, such as that shown in FIGS. 4A-4B, the cap 412 may extenddown an entire length, L, of the temperature sensor 408. The cap 412 maybe formed from a conductive material, such as aluminum. The fiber tube410 is disposed in the interior passage 404. The fiber tube 410 isconfigured to couple the temperature sensor 408 with the controller 190.

In operation, the lift pin 128 is configured to raise the substrate 101off the top surface 194 of the support plate 120 by contacting thesubstrate 101 with the top surface 406 of the lift pin 128. Because thetop surface 406 of the lift pin 128 is rounded, the cap 412 is theportion of the top surface 406 that contacts the bottom surface of thesubstrate 101. The temperature sensor 408 is configured to measure atemperature of the substrate 101 when the lift pin 128 is in contactwith the substrate 101

In another embodiment, the body 402 may include an opening 414 formed ina side of the body 402. The opening 414 allows the fiber tube 410 toexit the lift pin 128 through the side and couple the temperature sensor408 to the PID controller 190. This ensures that the fiber tube 410 isnot damaged when the substrate support assembly 118 is lowered and thelift pin 128 is displaced through contact with another object at thebottom of the pin 128, for example by the bottom surface 106 of thechamber 100 when the substrate support assembly 118 is lowered to atransfer position.

The substrate temperature monitoring system 400 provides a contactmethod of measuring and controlling the temperature of the substrate101.

While the foregoing is directed to specific embodiments, other andfurther embodiments may be devised without departing from the basicscope thereof, and the scope thereof is determined by the claims thatfollow.

1. A substrate support assembly, comprising: a support plate having atop surface configured to support a substrate; and a substratetemperature monitoring system disposed in the substrate support plate,the substrate temperature monitoring system configured to measure atemperature of the substrate from a bottom surface of the substrate, thesubstrate temperature monitoring system comprising: a window integrallyformed in a top surface of the support plate; a body embedded in thesupport plate, through the bottom surface, the body having an interiorpassage; and a temperature sensor disposed in the interior passagebeneath the window, the temperature sensor configured to measure totemperature of the substrate.
 2. The substrate support assembly of claim1, wherein the body is a hex plug that is screwed into the supportplate.
 3. The substrate support assembly of claim 1, further comprisinga fiber tube disposed in the interior passage, the fiber tube coupled tothe temperature sensor.
 4. The substrate support assembly of claim 3,wherein the fiber tube couples the temperature sensor with a PIDcontroller.
 5. The substrate support assembly of claim 1, wherein thewindow is formed from quartz or yttrium.
 6. A substrate supportassembly, comprising: a support plate having a top surface configured tosupport a substrate; and a substrate temperature monitoring systemdisposed in the support plate, the substrate temperature monitoringsystem configured to measure a temperature of the substrate from abottom surface of the substrate, the substrate temperature monitoringsystem, comprising: a body defining an inner cavity; an aperture nutdisposed in the body; a lens disposed in the body and supported by theaperture nut; an optical fiber tube disposed in the inner cavity, spacedapart from the lens, the optical fiber tube configured to receive aninfrared ray from the bottom surface of the substrate through the lensand a controller in communication with the optical fiber tube, thecontroller configured to determine the temperature of the substratebased on the received infra-red rays.
 7. The substrate support assemblyof claim 6, wherein the lens is a plano-convex lens.
 8. The substratesupport assembly of claim 6, wherein the lens is formed from one ofCaF2, MgF2, BaF2, and Yr2O3.
 9. The substrate support assembly of claim6, wherein the aperture nut includes a conical aperture that is alignedwith the lens.
 10. The substrate support assembly of claim 6, whereinthe support plate further includes a tapped hole, and wherein thesubstrate temperature monitoring system is disposed beneath the tappedhole such that the lens is aligned with the tapped hole.
 11. Thesubstrate support assembly of claim 6, wherein the aperture nut isformed from a low-emissivity material.
 12. The substrate supportassembly of claim 6, wherein the optical fiber tube has an outputdivergence half angle of about 30 mRad.
 13. The substrate supportassembly of claim 6, wherein the optical fiber tube is disposed in thebody at a location where an image is projected by the lens.
 14. Thesubstrate support assembly of claim 6, wherein the aperture nut ispositioned at a distance from the lens that is less than a distance of afocal length of the lens.
 15. The substrate support assembly of claim 6,further comprising: a plurality of o-rings positioned beneath the lens,the plurality of o-rings configured to seal and prevent the opticalfiber tube from being attacked by a cleaning agent.
 16. A processingchamber, comprising: a chamber body comprising a top wall, a sidewall,and a bottom wall defining a processing region in the chamber body; anda substrate support assembly disposed in the processing region, thesubstrate support assembly comprising: a support plate having a topsurface configured to support a substrate; and a substrate temperaturemonitoring system disposed in the support plate, the substratetemperature monitoring system configured to measure a temperature of thesubstrate from a bottom surface of the substrate, the substratetemperature monitoring system, comprising: a body defining an innercavity; an aperture nut disposed in the body; a lens disposed in thebody and supported by the aperture nut; an optical fiber tube disposedin the inner cavity, spaced apart from the lens, the optical fiber tubeconfigured to receive an infrared ray from the bottom surface of thesubstrate through the lens; and a controller in communication with theoptical fiber tube, the controller configured to determine thetemperature of the substrate based on the received infra-red rays.17-20. (canceled)
 21. The processing chamber of claim 16, wherein thelens is a plano-convex lens.
 22. The processing chamber of claim 16,wherein the aperture nut includes a conical aperture that is alignedwith the lens.
 23. The processing chamber of claim 16, wherein thesupport plate further includes a tapped hole, and wherein the substratetemperature monitoring system is disposed beneath the tapped hole suchthat the lens is aligned with the tapped hole.
 24. The processingchamber of claim 16, wherein the optical fiber tube has an outputdivergence half angle of about 30 mRad.